Piezo stages with nanopositioning

The MIPOS series feature a motion of up to 500μm for the microscope objective in
combination with nanometer accuracy. The design, which incorporates a pre-load of the actuator, permits a high resonant frequency of up to 410 Hz and high parallel travel, as well as an upsidedown version for inverse microscopes. Solid state hinges free of play guarantee a high dynamic range. An optional feedback sensor compensates hysteresis and drift and offers high
stability and linearity in closedloop operation.

Applications: surface scanning and analysis, AFM microscopy, biotechnology (e.g. cell scanning), beam focusing for printing processes and semiconductor test equipment.

In case you have any questions after having read this article, or when you are interested in additional information or pictures, then please contact us by phone at +31 (0)297-266 191 or by e-mail abos@laser2000.nl

 

« return to news overview